| 摘要 |
PURPOSE:To optically and precisely measure the position of stepped edge part of work having a step. CONSTITUTION:The formulae of straight lines L1 and L2 showing the linear parts S1a and S1c in both sides of a stepped part S1b in a light-section image for a work having a step is obtained from the image gravities G2-G5 within the windows W2-W5 which are set in respective linear parts. The end points C and D on the stepped part S1b side of the light-section image on the respective lines L1 and L2 are detected thereafter. While a line segment L connecting the both end points is used as a reference, specified two windows W6 and W7 are set in the stepped part S1b, a formula showing the part S1b is obtained from the image gravities G6 and G7 within the both windows. Then the position of the stepped edge part of the work is measured by using the crossing point E of the lines L1 and L3 as a measuring reference point. |
