发明名称 |
Reed contactor and process of fabricating suspended tridimensional metallic microstructure |
摘要 |
A reed contactor includes a base plane comprising two distinct conducting zones. Two shafts of the contactor have the form of blades, each of which engages a base plane at the level of one of the conducting zones. One of the beams at least is supported on the base plane by means of a foot on which it is mounted in an overhanging manner. The contactor is formed by process comprising the steps of forming successively on a substrate an alternance of levels of photoresist and of metallization. At each step, the level of upper photoresist is configured to create in its thickness free growth spaces in which metal pins are formed by galvanic growth. The levels of photoresist situated under the last level of metallization play the role of sacrificial layers and allow the formation of suspended metallic structures.
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申请公布号 |
US5430421(A) |
申请公布日期 |
1995.07.04 |
申请号 |
US19930166359 |
申请日期 |
1993.12.14 |
申请人 |
ASULAB S.A. |
发明人 |
BORNAND, ETIENNE;SIMON, JEAN-LUC |
分类号 |
H01H11/00;H01H1/00;H01H1/66;H01H36/00;(IPC1-7):H01H1/66 |
主分类号 |
H01H11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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