| 摘要 |
PURPOSE:To detect a projection, etc., accurately and simple by polishing the surface of a member to be polished such as a color filter. CONSTITUTION:Tongue sections 158B are inserted into rectangular holes 156 under the state, in which the shoulder sections of fillers 158 are supported to an arcuate groove 154, and the filler 158 is balanced so that the top face of the bent section of the shoulder section is brought to a horizontal state under a normal state. Photosensors 160 are mounted on a ceiling space, and the fillers 158 are rotated centering around the support surface of the arcuate groove 154 under the state of light reception under a normal state-that is, when projecting sections having length of 4mum or more reach the places of the arrangement of the fillers 158, and brought to the state of light-non-reception. The places of the projecting sections can be specified from a number displaying the photosensors 160 and a pulse value from a pulse encoder set up on a motor. |
