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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH07169931(A)
申请公布日期
1995.07.04
申请号
JP19930316271
申请日期
1993.12.16
申请人
HITACHI LTD;NIPPON HOSO KYOKAI <NHK>
发明人
TSUJI KAZUTAKA;SAMEJIMA KENJI;NAKANO YASUSHI;MAKISHIMA TATSUO;OSHIMA TETSUYA;KUBOTA SETSU;KATO TSUTOMU;MARUYAMA HIROTAKA
分类号
H01L27/146;H01L31/0264;(IPC1-7):H01L27/146;H01L31/026
主分类号
H01L27/146
代理机构
代理人
主权项
地址
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