| 发明名称 |
Organic compounds for application in the field of electronics. |
| 摘要 |
The invention relates to organoelemental compounds which are distinguished by one or more element-nitrogen bonds, and to their application in producing thin films or epitaxial layers by gas-phase deposition. |
| 申请公布号 |
GR3015256(T3) |
申请公布日期 |
1995.06.30 |
| 申请号 |
GR19950400294T |
申请日期 |
1995.03.02 |
| 申请人 |
PPM PURE METALS GMBH |
发明人 |
ZIMMER, MICHAEL, DR. |
| 分类号 |
C07F9/02;C07F9/06;C07F9/22;C07F9/28;C07F9/66;C07F9/68;C07F9/90;C23C16/18;C30B23/08;C30B25/02;C30B25/06;H01L21/205;(IPC1-7):C30B25/02 |
主分类号 |
C07F9/02 |
| 代理机构 |
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代理人 |
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