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发明名称
Akustisches Tunnelmikroskop.
摘要
申请公布号
DE69015840(T2)
申请公布日期
1995.06.29
申请号
DE1990615840T
申请日期
1990.02.15
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
TAKATA, KEIJI, TOKOROZAWA-SHI, JP;SHIMIZU, HIROMICHI, HOYA-SHI, JP;HOSOKI, SHIGEYUKI, HACHIOJI-SHI, JP;HOSAKA, SUMIO, NISHITAMA-GUN, TOKYO, JP
分类号
G01B7/34;G01N27/00;G01N27/02;G01N29/06;G01N29/24;G01N37/00;G01Q60/00;G01Q60/04;G01Q60/10;G01Q60/14;G01Q70/10;H01J37/28;(IPC1-7):G01N27/00
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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