发明名称 GAS FRICTION VACUUM INDICATOR WITH A GAS FRICTION SENSOR THAT ROTATES AROUND A FIXED AXIS OF ROTATION
摘要 A gas friction vacuum indicator has a gas friction sensor (2) that rotates around a fixed axis of rotation (reference number 20). The gas friction sensor is magnetically and contactlessly mounted within an evacuable measurement chamber. The magnetic field required for that purpose is rotationally symmetrical in relation to the axis of rotation (20) and may be regulated. The measurement chamber may spatially communicate with a vacuum chamber (4) whose vacuum is to be measured. In order to allow the measurement chamber axis to be placed in any desired position, the axis of rotation (20) is oriented away from the vertical (21), preferably horizontally. A measurement device (for example 22), whose output signal is used to correct the displayed pressure value, measures the inclination (24) of the axis of rotation (20) in relation to the vertical (21).
申请公布号 CA2179750(A1) 申请公布日期 1995.06.29
申请号 CA19942179750 申请日期 1994.12.14
申请人 发明人 LINDENAU, BERND;FREMEREY, JOHAN K.;WITTHAUER, KLAUS
分类号 G01L21/16;G01L21/24;(IPC1-7):G01L21/16 主分类号 G01L21/16
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