Intelligent test line system.

摘要

Process information obtained by a process section (11) is input to a host computer (13). The process information includes information about a film, information about etching, information about cleaning, information about heat treatment, and information about a test. Yield information obtained by a D/S section (12) is also input to the host computer (13). The host computer (13) classifies wafers or lots into a plurality of quality ranks on the basis of these pieces of information, and supplies process conditions determined on the basis of the quality ranks to a burn-in section (14) and a test section (15). The burn-in section (14) and the test section (15) respectively execute screening tests on the basis of the process conditions. <IMAGE>