发明名称 DEVICE FOR MEASURING THE ELECTRICAL PROPERTIES OF A DIELECTRIC FILM
摘要 A dielectric test device formed on a substrate which includes a conductive ground plane layer formed over the substrate, a dielectric layer over the ground plane layer and a short and long conductive strip overlying the dielectric layer. Each of the long and short strips extends between common input and output conductive pads and are substantially identical in all respects except for length. Measurement of the interference pattern at the output node resulting from an input signal of a single frequency applied to the input node as frequency is varied over the gigahertz range allows the calculation of effective dielectric constant, propagation velocity as a function of frequency and attenuation.
申请公布号 CA2012336(C) 申请公布日期 1995.06.27
申请号 CA19902012336 申请日期 1990.03.16
申请人 PMC-SIERRA, INC. 发明人 NEUFELD, RICHARD D.
分类号 G01R27/26;(IPC1-7):G01R31/26;G01R27/02;G01R27/04 主分类号 G01R27/26
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