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发明名称
GAS DEPOSITION DEVICE
摘要
申请公布号
JPH07166332(A)
申请公布日期
1995.06.27
申请号
JP19930341484
申请日期
1993.12.10
申请人
VACUUM METALLURGICAL CO LTD
发明人
FUCHIDA HIDETSUGU
分类号
C23C14/24;C23C14/02;C23C14/22;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
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