Method and apparatus for three-dimensional detection of particles

摘要

The position, size, structure, and the like of each particle can be accurately detected. Gray image data of a tomographic image group having a clear positional correlation in a sample where particles are distributed is obtained to obtain three-dimensional gray image data of each particle. Binarization of a density of each pixel data of the three-dimensional gray image data is performed to obtain three-dimensional binary image data of each particle. Three-dimensional shrinkage of the three-dimensional binary image data is performed to convert binary image data of each particle to binary image data of only a central point thereof, thereby the position of each particle is three-dimensionally confirmed.