Data compaction techniques for generation of a complex image

摘要

A data compaction technique permits electron beam lithography systems to operate more efficiently in the fabrication of complex computer chips. One or more building block patterns are selected for the design to be encoded. Each shape in the set of building block patterns is given a sequence number for use in a data word for the design. The set of shape descriptors for each block is stored in a reference memory. The data word referencing a block includes a number of bytes which specify the stored block pattern data and control bits corresponding to sequence numbers of the pattern shapes in a maximum shape configuration. Each shape is assigned a bit according to its sequence number.