发明名称 POLISHING DEVICE
摘要 PURPOSE:To provide a polishing device for applying oscillation movement to a polishing head for keeping a polishing tape contact with a body to be polished and for rocking the polishing head. CONSTITUTION:A first plate 30 faces a second plate 42 in parallel. Both the plates are connected to each other by a rod penetrated through and extended from a hole corresponding to the second plate 42 from the first plate 30. The second plate 42 is connected to the rotating shaft 41 of a motor 8 having a through hole 41' along the shaft line. The first plate 30 is connected to the tip of an oscillation shaft 44 penetrated through the through hole 41'. Rotating the rotation shaft 41 rotates the first plate 30 as well as the second plate 42. Reciprocating the shaft 44 applies oscillation movement to the first plate 30. As the result, a polishing head is allowed oscillation movement and rocking movement.
申请公布号 JPH07164301(A) 申请公布日期 1995.06.27
申请号 JP19930341224 申请日期 1993.12.13
申请人 NIPPON MICRO KOOTEINGU KK 发明人 MORIOKA IZURU;YUI MAREYOSHI
分类号 B24B9/00;B24B9/06;B24B21/00;B24B35/00;(IPC1-7):B24B21/00 主分类号 B24B9/00
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