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经营范围
发明名称
RF POWER SUPPLY
摘要
申请公布号
JPH07161494(A)
申请公布日期
1995.06.23
申请号
JP19930307904
申请日期
1993.12.08
申请人
JEOL LTD
发明人
KATO TSUTOMU
分类号
H05H1/46;C23C16/50;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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