THIN ZIRCONIA DIAPHRAGM STRUCTURE, ITS MANUFACTURE, AND PIEZOELECTRIC/ELECTROSTRICTIVE FILM DEVICE USING THE SAME

摘要

PURPOSE:To prevent generation of recesses and cracks in sintered a zirconia diaphragm, by preparing a green zirconia sheet that contains specific substance. CONSTITUTION:A zirconia substrate 4 contains alumina component and calcia component or magnecia component and/or silica component together with the alumina component and the calcina component whose total amount is 0.1-5.0wt.%. A diaphragm structure body 2 is integrally constituted of a zirconia substrate 4 as a retainer having a window part 6, and a thin zirconia diaphragm plate 8 which covers the window part 6. That is, the diaphragm structure body 2 is obtained as follows; after a zirconia green sheet giving the diaphragm plate 8 is stuck on a zirconia green substrate giving the zirconia substrate 4 so as to cover the window part, and an integrally unified laminate is obtained, it is wholly baked.