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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07161706(A)
申请公布日期
1995.06.23
申请号
JP19930306558
申请日期
1993.12.07
申请人
NEC CORP
发明人
KUWATA TAKAAKI
分类号
H01L21/768;H01L21/316;H01L21/3205;H01L23/52;H01L23/522;(IPC1-7):H01L21/316
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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