| 摘要 |
PURPOSE:To reduce the number of fixing directions of reflection mirror to the absolute minimum and to prevent the local deformation of the reflection mirror from being caused by the deformation of a reflection mirror fixing device. CONSTITUTION:This reflection mirror fixing mechanism fixing the reflection mirror in a mirror cell is constituted of a supporting structural part 10 fixed in the mirror cell, a lever 7 supported by an R-rotation part 9 capable of rotating around an axis in parallel with the circumferential direction of the reflection mirror by the structural part 10, rotation parts 4 to 6 attached to the lever 7 and capable of rotating around a Z-axis being the axial direction of the lever and in a direction R and around a theta-axis which are crossed with the Z-axis, and a bonding part 3 attached to the rotation part and bonding the reflection mirror. Then, the fixing direction of the reflection mirror by the reflection mirror fixing mechanism is set as the Z-axis direction and the theta-axis direction. |
