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发明名称
ETCHING METHOD AND DEVICE
摘要
申请公布号
JPH07161680(A)
申请公布日期
1995.06.23
申请号
JP19930303149
申请日期
1993.12.03
申请人
FUJITSU LTD
发明人
SUMI KAZUHIKO
分类号
C23F1/08;H01L21/306;H01L21/308;(IPC1-7):H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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