METHOD OF FORMING SEMICONDUCTOR THIN FILM,申请号JP19930310976-传众专利搜索

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发明名称	METHOD OF FORMING SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPH07161811(A)	申请公布日期	1995.06.23
申请号	JP19930310976	申请日期	1993.12.13
申请人	SONY CORP	发明人	NAGASHIMA NAOKI
分类号	H01L21/762;H01L21/02;H01L21/304;H01L21/76;H01L27/12;(IPC1-7):H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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