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发明名称
MOLDING MACHINE
摘要
申请公布号
JPH07161743(A)
申请公布日期
1995.06.23
申请号
JP19930302682
申请日期
1993.12.02
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
KUMANO JUNICHI
分类号
H01L21/66;H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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