发明名称 |
CONVEYER DEVICE FOR ARTICLES OF EVAPORATE APPARATUS |
摘要 |
The transferring apparatus prevents the collision of impure particles from pinions against the workpiece and agitation of the workpiece. The transferring apparatus comprises (A) a workpiece feeder (11), a depositing area (12) and a discharger (13); (B) a rotating shaft (14a) equipped with a couple of pinions (14); (C) a motor (17) to supply power to the pinions by chains (15) and a spur rocket (16); (D) a moving plate (19) above the rack (20).
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申请公布号 |
KR950006833(B1) |
申请公布日期 |
1995.06.23 |
申请号 |
KR19930001583 |
申请日期 |
1993.02.05 |
申请人 |
VARIAN LTD. |
发明人 |
HYUN, KWANG - SU;LEE, JAE - SUN |
分类号 |
C23C16/54;(IPC1-7):C23C16/54 |
主分类号 |
C23C16/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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