发明名称 CONVEYER DEVICE FOR ARTICLES OF EVAPORATE APPARATUS
摘要 The transferring apparatus prevents the collision of impure particles from pinions against the workpiece and agitation of the workpiece. The transferring apparatus comprises (A) a workpiece feeder (11), a depositing area (12) and a discharger (13); (B) a rotating shaft (14a) equipped with a couple of pinions (14); (C) a motor (17) to supply power to the pinions by chains (15) and a spur rocket (16); (D) a moving plate (19) above the rack (20).
申请公布号 KR950006833(B1) 申请公布日期 1995.06.23
申请号 KR19930001583 申请日期 1993.02.05
申请人 VARIAN LTD. 发明人 HYUN, KWANG - SU;LEE, JAE - SUN
分类号 C23C16/54;(IPC1-7):C23C16/54 主分类号 C23C16/54
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