| 摘要 |
PURPOSE:To separately recorver a plurality of types of treatment liquid by simple constitution without enlarging the substrate surface treatment device so as to perform prescribed surface treatment on the surface of a substrate by subsequently supplying a plurality of types of treatment liquid on the surface of the substrate arranged in a substrate treatment space. CONSTITUTION:A cup 3 is arranged so as to surround a chuck 1, and a substrate treatment space 4 is formed. The cup 3 is connected to a collecting ox 6 and waste liquid collected in the cup 3 is collected to the collecting box 6. A waste liquid part 7 is connected to the bottom side plane of the collecting box 6, and an exhaust pressure adjusting part 8 is connected to the top side plane. The waste liquid part 7 is provided with a plurality of waste liquid paths, and waste liquid is discharged by the selected path by controlling the opening/closing operation of valves (a) and (b) according to the type of treatment liquid. The exhaust pressure adjusting part 8 controls the opening and closing of a damper so as to adjust the exhaust pressure and to control the pressure in the collecting box 6. |
