发明名称 |
LAYOUT METHOD FOR MASK PATTERN |
摘要 |
PURPOSE:To perform efficient layout. CONSTITUTION:A mask pattern is laid out based on attributes and connection information 2 and 4 of elements constituting a circuit diagram, group information which consists of constraints related to shapes and arrangement or spatial positional relations of elements and is used to divide the elements, and grade information 8 which indicates priorities of layout of elements divided by group information 6. |
申请公布号 |
JPH07160755(A) |
申请公布日期 |
1995.06.23 |
申请号 |
JP19930309218 |
申请日期 |
1993.12.09 |
申请人 |
TOSHIBA CORP;TOSHIBA JOHO SYST KK |
发明人 |
TASAI TAKAHIRO;YOSHIDA YOSHIHIRO |
分类号 |
C23F1/00;G03F1/70;G06F17/50;H01L21/82 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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