| 摘要 |
PURPOSE:To carry out the data measurement in a certain processing time independently of the quantity of dark parts, in a method for inspecting the surface of a workpiece by measuring the data in each item of the dark part which appears on the image of an image pick-up means because of a defective part on the surface of the workpiece, by using an optical type inspection device equipped with the image pick-up means for receiving the reflected light supplied from the surface of the workpiece. CONSTITUTION:A labelling image is formed so that each dark part appearing on the image of an image pick-up means is displayed with luminances different from each other (S2). The area of each luminance part is measured in the lump by scanning all the regions of the labelling image (S3). Similarly, the position of each luminance part is measured in the lump by scanning all the regions of the labelling image (S4). Accordingly, the generation of the trouble that the processing time varies according to the quantity of the dark part as in the case where each dark part is extracted and the area and position are measured individually is prevented. |
