发明名称 DISCHARGE TORCH ELECTRODE, WIRE BONDING DEVICE USING THEREOF AND PAD FORMING DEVICE
摘要 PURPOSE:To obtain excellent abrasion-resisting property for high voltage sparks and excellent discharge characteristics by a method wherein a discharge torch electrode is formed by the composite material containing one or more kinds of a precious metal, a metal carbide, a metal silicide, a metal nitride and a metal boride. CONSTITUTION:A discharge torch electrode is manufactured by dispersing noble metals into the substrate consisting of one or more kinds selected from a metal carbide, a metal silicide, a metal nitride and a metal boride. Concretely, the porous material consisting of one or two or more kinds selected from the metal carbide, the metal silicide, the metal nitride and the metal boride is impregnated with a noble metal. Gold and platinum are preferable because they are not oxidized in atmospheric air and their bonding characteristics are stable, the adhesion of soot-like substance on the surface of a discharge torch electrode can be prevented and a spark error can also be prevented. Platinum is hardly contaminated, and also it has excellent characteristics against the arc abrasion.
申请公布号 JPH07161753(A) 申请公布日期 1995.06.23
申请号 JP19930305049 申请日期 1993.12.06
申请人 TOSHIBA CORP 发明人 KAWAI MITSUO;SENDA CHUICHI
分类号 H01L21/60 主分类号 H01L21/60
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