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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07161812(A)
申请公布日期
1995.06.23
申请号
JP19930309027
申请日期
1993.12.09
申请人
MATSUSHITA ELECTRON CORP
发明人
HARADA YUJI
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
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