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发明名称
SELECTIVE ETCHING METHOD
摘要
申请公布号
JPH07162046(A)
申请公布日期
1995.06.23
申请号
JP19930302898
申请日期
1993.12.02
申请人
MITSUBISHI CHEM CORP
发明人
TANAMURA MITSURU;KUNITOMO HARUO;WATABE YUKIO
分类号
H01L39/24;H01L21/302;H01L21/306;H01L21/3065;(IPC1-7):H01L39/24
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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