| 摘要 |
PURPOSE:To allow simultaneous formation and assembling of a plurality of components of piezoelectric actuator by eliminating the protrusion from the surface of an elastic body for bonding a piezoelectric material and providing an elastic body for forming a plurality of piezoelectric actuator components on a wafer with stretching members. CONSTITUTION:A plurality of planar elastic bodies 1a, 1b, 1c and 1d are provided, on one side thereof, with at least one stretching members 7a, 7b and 7c, respectively, and bonded, on the other side thereof, with polarized piezoelectric members 2a, 2b, 2c and 2d having electrode members 6a, 6b, 6c and 6d. When high frequency voltage is applied to four pieces of elastic bodies 1a, 1b, 1c and 1d and the piezoelectric members 2a, 2b, 2c and 2d thus combined, the piezoelectric members 2a, 2b, 2c and 2d expand and contract to cause bending motion of the elastic bodies 1a, 1b, 1c and 1d and the piezoelectric members 2a, 2b, 2c and 2d corresponding to the change in the polarity of high frequency voltage to be applied. |
