| 摘要 |
<p>PURPOSE:To obtain a device having good display quality by providing row electrodes, anodically oxidized layer on the row electrode, pixel electrode on the anodically oxidized layer, intermediate protective film on the pixel electrode, and protective film on the intermediate protective film, and further an IC connecting electrode connected to the row electrode. CONSTITUTION:A row electrode 13, anodically oxidized layer 14, and pixel electrode 15 are successively formed on a glass substrate 12 to obtain an MIM (metal layer-insulating layer-metal layer) element 32. Further, an intermediate protective film 25 is formed as a diffusion preventing layer under a protective film 16. Further, an IC connecting electrode 17 which is connected with the row electrode 13 is formed. The intermediate protective film 25 consists of silicon dioxide, aluminum oxide, silicon nitride or mixture of these. By forming the intermediate protective film 25 between the transparent electrode film and the protective film 16, the resistance of the output terminal of the MIM element 32 can be decreased and variation in resistance of the output terminal is decreased.</p> |
