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发明名称
SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号
JPH07161658(A)
申请公布日期
1995.06.23
申请号
JP19930340075
申请日期
1993.12.07
申请人
MITSUBISHI MATERIALS CORP;CHIKYU KANKYO SANGYO GIJUTSU KENKYU KIKO
发明人
TOMIYAMA YASUYOSHI;FUSEGAWA KAZUHIRO;KAMIYAMA EIJI
分类号
H01L21/28;H01L21/20;H01L31/0248;(IPC1-7):H01L21/28;H01L31/024
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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