| 摘要 |
<p>PURPOSE:To provide a field emission cathode wherein storage gas can be completely removed from a gate electrode. CONSTITUTION:A cathode electrode 2 is formed on an insulating substrate 1, to successively form an insulating layer 4, magnetic material layer 22 and a gate electrode 21 on this cathode electrode 2. An opening 23 is provided in these gate electrode 21, magnetic material layer 22 and insulating layer 4, to form an emitter cone 13 in this opening 23. Since the magnetic material layer 22 is constituted of magnetic material, by high-frequency heating the magnetic material layer 22 heated, the gate electrode 21 formed on the magnetic material layer 22 is locally heated. Consequently, stored gas in the gate electrode 21 is released.</p> |
