HIGH RESOLUTION HIGH SPEED FILM MEASURING APPARATUS AND METHOD

摘要

A high speed high resolution solid film measuring apparatus (10) and method uses coherent monochromatic light (14) by passing the coherent monochromatic light (14) through the solid film (30) and referencing the degree of absorption to known or on-line measured rererence values. The measuring apparatus (10) and method accounts for difference in clarity and translucency to derive a running analysis of the solid film (30) thickness. Resolution and speed of the measuring apparatus (10) provides for the adaptation of the measuring device (10) to on-line manufacturing systems as part of a feedback control loop through the manufacturing process.