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发明名称
Verfahren zum Abdichten herstellprozeßbedingter Öffnungen an mikromechanischen Beschleunigungssensoren
摘要
申请公布号
DE4342890(A1)
申请公布日期
1995.06.22
申请号
DE19934342890
申请日期
1993.12.16
申请人
MANNESMANN KIENZLE GMBH, 78052 VILLINGEN-SCHWENNINGEN, DE
发明人
SCHREIBER-PRILLWITZ, WOLFGANG, DIPL.-PHYS., 78056 VILLINGEN-SCHWENNINGEN, DE;PLANKENHORN, HORST, DIPL.-ING. (FH), 78048 VILLINGEN-SCHWENNINGEN, DE
分类号
G01P1/02;G01P15/125;(IPC1-7):G01P15/125;G01P1/00;H01L21/52
主分类号
G01P1/02
代理机构
代理人
主权项
地址
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