发明名称 |
Method for forming crystal article. |
摘要 |
<p>A method for forming a crystal article comprises forming a plurality of monocrystals with a desired size at a desired position on a substrate comprising an amorphous insulating material and having a non-nucleation surface by crystal forming treatment, wherein prior to the crystal forming treatment a plurality of concavities with a desired size and form are formed respectively in a region to be covered with a single monocrystal on the substrate, and a single monocrystal is formed to full the plurality of concavities by the crystal forming treatment and thereafter the monocrystal is flattened by removing it to the same level as the upper surface of the substrate.</p> |
申请公布号 |
EP0486066(B1) |
申请公布日期 |
1995.06.21 |
申请号 |
EP19910119570 |
申请日期 |
1991.11.15 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SATO, NOBUHIKO, C/O CANON KABUSHIKI KAISHA |
分类号 |
H01L29/786;C30B25/18;C30B29/06;H01L21/20;H01L21/205;H01L21/336;H01L21/84;H01L27/12;H01L29/78;(IPC1-7):C30B25/18 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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