发明名称 |
Optically guided macroscopic-scan-range/nanometer resolution probing system |
摘要 |
A large-nanostructure probe with optically guided macroscopic scanning is disclosed for high-resolution imaging and characterization of nanostructures. The invention contemplates the use of a course positioning system, which comprises one or more quadratic index fiber optic lenses in conjunction with an optical microscope. A magnifying probe is placed in close proximity to a sample under inspection. The fiber optic lenses of the coarse positioning system are used to noninvasively carry the image of a sample-to-probe junction to the optical microscope. The optical microscope further magnifies the image, allowing for precise positioning of the probe tip to within 1 mu m of a desired feature on the sample surface. For ease of viewing, the magnified image from the microscope may be displayed on a monitor using a charge coupled device ("CCD") camera, if so desired. Also disclosed is a long-range probing system wherein the probe tip may be one of a variety of measurement or probing apparatus. For example, a particularly effective configuration of the long-range probing system is one in which the optical viewing system of the present invention serves as part of a coarse approach system for a scanning tunneling microscope probe.
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申请公布号 |
US5426302(A) |
申请公布日期 |
1995.06.20 |
申请号 |
US19930054457 |
申请日期 |
1993.04.28 |
申请人 |
BOARD OF REGENTS, UNIVERSITY OF TEXAS |
发明人 |
MARCHMAN, HERSCHEL;WETSEL, GROVER C. |
分类号 |
G01Q20/02;G01Q60/10;G01Q60/18;(IPC1-7):H01J37/00 |
主分类号 |
G01Q20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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