| 摘要 |
PURPOSE:To achieve a higher responsibility by building up a gate electrode having an ion sensitive film thereon with a double construction comprising layers mainly composed of silver chloride and silver respectively or a layer containing silver chloride and silver. CONSTITUTION:A copper foil 1a of a glass-fiber-reinforced epoxy resin substrate 1 is etched to form a source electrode 2, a drain electrode 3, a gate electrode 4 and a separation gate electrode 4a in the extension of the gate electrode 4. Then, the surface of the copper foil 1a is plated with silver and moreover, the surface of the separation gate part 4a is treated by 0.1 NHCl to form a silver chloride film 4b. Subsequently, a levee body 6 made up of an insulating material such as epoxy resin is formed to make a window 7 for dropping samples and a FET 5 is soldered on the electrodes 2, 3 and 4. Then, an ion sensitive film 8 is formed on the separation gate 4a to obtain an ion sensor thereby achieving a higher speed of response of a separation gate type ion sensor. |
