| 摘要 |
<p>PURPOSE:To safely and efficiently treat NF3 by packing a metal having a specified property in a column, heating the metal and allowing nitrogen trifluroride-containing gas to flow through the column. CONSTITUTION:The metal such as chromium or manganese forming a solid metal fluoride by reacting with the NF3 and having a specific surface area of >=1m<2>/g is used. This metal is packed in a column capable of using at high temp., and the column temp is set to 150-500 deg.C, pref. to 200-400 deg.C, and diluted NF3 is allowed to flow from one side thereof to remove the harmful effect, and discharged to the atmosphere from the other side. By using metal powder under such a specified condition, the harmful effect removing efficiency is improved at relatively low temp. and the energy cost can become advantageous one.</p> |
