发明名称 LAMINOGRAPH
摘要 PURPOSE:To realize excellent focusing only on a focal plane, by a method wherein relative rotation is induced between an object to be detected, a radiant ray source, and a two-dimensional radiation detector, the output thereof is collected as a plurality of transmission images, and image data on the transmission images of a radiant ray path are added each focus plane. CONSTITUTION:The couple of a radiant ray source 1a and a two-dimensional radiation detector 2a revolves on the locus 4a for the source and the detector center locus 5a, respectively, while keeping an inclination angle alpha to the axis Z passing an object 3 to be detected. A projection point of each revolution angle is calculated, and image data at the point are added and averaged. Thereby transmission data for the circular cone beam formed by the locus 4a of the radiant ray source wherein the projection point q0 is set as the vertex are calculated. The pattern except the projection point q0 is slightly defocused. By similarly calculating a lot of points arranged in a mesh type on a focal plane 3a, a lamino image as the transmission images focused on the focal plane 3a can be obtained.
申请公布号 JPH07153803(A) 申请公布日期 1995.06.16
申请号 JP19930299197 申请日期 1993.11.30
申请人 TOSHIBA CORP 发明人 UYAMA KIICHIRO;FUJII MASAJI
分类号 H01L21/66;G01N23/04;H05K3/46 主分类号 H01L21/66
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