| 摘要 |
<p>PURPOSE:To obtain a resist compsn. excellent in such various properties is color density, spectral characteristics, resolution and heat resistance. CONSTITUTION:This resist compsn. contains an alkali-soluble resin, a solvent and a dye represented by the general formula (where each of A and B is H, alkyl or aryl, R is alkyl, cycloalkyl, alkoxy, alkoxyalkyl, aryl, etc., M is H, etc., 0<=m<=2 and 1<=n<=3).</p> |
