| 摘要 |
<p>PURPOSE:To provide a field emission type electron source in which a resistance value between a cathode wiring and each emitter cone is almost constant, and in which packaging density is improved. CONSTITUTION:A cathode wiring 2 of strips is formed on an insulation substrate 1, and plural island-shaped cathode conductors 7 are formed inside the cathode wiring separately from the cathode wiring 2. A resistance layer 3, an insulation layer 4, and a gate electrode 5 are formed on it. Aperture parts are provided at the gate electrode 5 and the insulation layer 4, and emitter cones 6 are formed inside the aperture parts. Emission of the emitter cones 6 by the unit of group can thus be equalized.</p> |
