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发明名称
PLASMA REACTOR
摘要
申请公布号
JPH07153703(A)
申请公布日期
1995.06.16
申请号
JP19930323143
申请日期
1993.11.29
申请人
M C ELECTRON KK
发明人
YONEYAMA SHIMAO
分类号
H01L21/302;H01L21/205;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
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