| 摘要 |
PURPOSE:To provide a supplied power control method/device for a semiconductor processor which supplies the power to the semiconductor processor without actuating a current limiter, starts smoothly the processor to restart and continue the necessary processing, and can relieve the object under processing when a power supply is recovered in a short time after a momentary power failure, etc. CONSTITUTION:This power control method can supply the power to carry on again the processing interrupted by a power failure after the power supply is recovered and while a thyristor 3 is controlled by a controller 4 and at the same time a semiconductor wafer is processed by a heat processor main body 1. Then the power control method includes a step where the power supply of the controller 4 is backed up by a back-up device 5 and also 8 power failure detection signal S2 concerning a power failure is sent to the controller 4 in a power failure mode, a step where a power limit signal is sent to the thyristor 3 from the controller 4 based on the signal S2, and a step where the thyristor 3 is operated based on the power limit signal and the power supplied from the recovered power supply is limited to a fixed rate of the power that is supplyed immediately before the power failure and supplied to the main body 1. |
