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发明名称
BONDING TOOL
摘要
申请公布号
JPH07153800(A)
申请公布日期
1995.06.16
申请号
JP19940174423
申请日期
1994.07.26
申请人
NEC CORP
发明人
URUSHIMA MICHITAKA
分类号
B23K20/02;B23K20/10;H01L21/60;H01L21/607;(IPC1-7):H01L21/607
主分类号
B23K20/02
代理机构
代理人
主权项
地址
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