发明名称 |
Capacitance sensor and method of manufacturing the same. |
摘要 |
A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material (2) such as KBr into a through-hole, forming a conductive thin film (4) on the surface, and dissolving and removing the alkali halide material (2). An insulating plate (1) disposed with a through-hole in the thickness direction is filled with a molten alkali halide material (2) such as KBr. After forming a conductive thin film (4) on the surface of the alkali halide material (2) filled into the through-hole and the vicinity thereof, the alkali halide material (2) is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film (4). A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film (4) is detected as a capacitance change between the conductive thin film (4) and the electrode layer (6). <IMAGE> <IMAGE> |
申请公布号 |
EP0657718(A1) |
申请公布日期 |
1995.06.14 |
申请号 |
EP19940119079 |
申请日期 |
1994.12.02 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
HAYASHI, SHIGENORI;KAMADA, TAKESHI;TORII, HIDEO;HIRAO, TAKASHI |
分类号 |
G01D5/241;G01L9/00;G01P15/125 |
主分类号 |
G01D5/241 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|