Verfahren zur Ziehung eines Siliziumeinkristalles.,申请号DE19906014266T-传众专利搜索

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发明名称	Verfahren zur Ziehung eines Siliziumeinkristalles.
摘要
申请公布号	DE69014266(T2)	申请公布日期	1995.06.14
申请号	DE19906014266T	申请日期	1990.08.29
申请人	SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP	发明人	KODAMA, YOSHIHIRO, NISHISHIRAKAWA-GUN, FUKUSHIMA-KEN, JP;ISHIDAIRA, TETSUYA, NISHISHIRAKAWA-GUN, FUKUSHIMA-KEN, JP;KANNO, KOJI, SHIRAKAWA-SHI, FUKUSHIMA-KEN, JP;FURUSE, SHIN-ICHI, NISHISHIRAKAWA-GUN, FUKUSHIMA-KEN, JP
分类号	C30B15/20;C30B15/00;C30B15/30;C30B29/06;H01L21/208;(IPC1-7):C30B15/00	主分类号	C30B15/20
代理机构		代理人
主权项
地址

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