发明名称 SUBSTRATE TEST SUPPORTING DEVICE
摘要 PURPOSE:To support a measuring person by teaching a measuring position by a laser beam. CONSTITUTION:The circuit diagram based on the CAD data from a control section 10 is projected on a CRT 11. The movement command of the laser beam is outputted from the control section 10 when an operator assigns the point to be inspected by using a mouse, etc. A scanner control section 15 analyzes the position information from an image processor 20 by receiving this operation command and controls the positions of galvanomirrors 17a, 17b. As a result, the point which is to be scanned and is assigned by the operator is irradiated with the laser beam.
申请公布号 JPH07148589(A) 申请公布日期 1995.06.13
申请号 JP19930298212 申请日期 1993.11.29
申请人 NISSAN MOTOR CO LTD 发明人 SUZUKI MOTOYUKI
分类号 B23K26/04;H01L21/66;(IPC1-7):B23K26/04 主分类号 B23K26/04
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