发明名称 |
Plate-like member conveying apparatus |
摘要 |
A plate-like member conveying apparatus includes five holding arms arranged parallel to each other in one direction and capable of supporting wafers, a link mechanism for connecting said holding arms to each other and for, when at least one holding arm is moved in the one direction, moving the remaining holding arms such that the pitch thereamong is equal, and a nut-screw driving mechanism for moving the at least one holding arm in the one direction.
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申请公布号 |
US5423503(A) |
申请公布日期 |
1995.06.13 |
申请号 |
US19930056918 |
申请日期 |
1993.05.05 |
申请人 |
TOKYO ELECTRON SAGAMI LIMITED |
发明人 |
TANAKA, SUSUMU;ASANO, TAKANOBU;KIKUCHI, HISASHI;SATO, NOBORU |
分类号 |
H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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