| 摘要 |
An apparatus for the treatment of articles with a polymerizate-producing gas plasma is disclosed wherein a set of movable film liners is used to shield the walls of a gas-plasma-containing reaction tunnel from excessive build-up of polymerizate deposits. Movable film liners (13) are fed from supply rolls (22) and passed through a reaction tunnel in close proximity to inner surfaces (19) of tunnel walls, and thence to take-up rolls (23). Alignment of the film liners (13) with tunnel wall surfaces (19) are controlled by entrance lip (24) and exit lip (25) mounts at the tunnel openings. Plasma deposits generated in a plasma zone (11) by radiofrequency (RF) electrodes (9) mounted on RF-transparent plates (12) are kept from tunnel wall surfaces (19) by the film liners (13). In an operation involving continuous gas plasma coating of a film, fiber, fabric, tubing or string of workpieces, at least 75 to 90 percent of potential wall deposits may be intercepted and removed by the film liners, thus avoiding polymerizate build-up and risk of cross-contamination in the plasma reaction tunnel. |
