An object such as an integrated circuit is worked using a high energy beam such as an electron beam. The beam works with a gas which is fed to the area above the object to either deposit or remove material onto or from the object surface. To improve the process a magnetic field is produced around the area to be worked.
申请公布号
DE4340956(A1)
申请公布日期
1995.06.08
申请号
DE19934340956
申请日期
1993.12.01
申请人
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH, 85551 KIRCHHEIM, DE
发明人
FROSIEN, JUERGEN, DR.-ING., 85521 RIEMERLING, DE;WINKLER, DIETER, DR., 81673 MUENCHEN, DE;ZIMMERMANN, HANS, 81541 MUENCHEN, DE
