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发明名称
Vorrichtung zur Bearbeitung von Halbleitersubstraten.
摘要
申请公布号
DE69201314(T2)
申请公布日期
1995.06.08
申请号
DE19926001314T
申请日期
1992.03.24
申请人
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP
发明人
OHTAKI, TOSHIO, TAKASAKI-SHI, GUNMA-KEN, JP;IKEDA, HITOSHI, ANNAKA-SHI, GUNMA-KEN, JP;YAMADA, MASATO, ANNAKA-SHI, GUNMA-KEN, JP;TAKENAKA, TAKAO, ANNAKA-SHI, GUNMA-KEN, JP
分类号
F27B7/20;C30B19/06;H01L21/00;H01L21/208;H01L21/22;H01L21/31;(IPC1-7):H01L21/00;C30B19/08
主分类号
F27B7/20
代理机构
代理人
主权项
地址
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